Micromachined silicon cantilevers with integrated high-frequency magnetoimpedance sensors for simultaneous strain and magnetic field detection

被引：17

作者：

Buettel, G. ^{[1
]}

Joppich, J. ^{[1
]}

Hartmann, U. ^{[1
]}

机构：

[1] Saarland Univ, Inst Expt Phys, D-66041 Saarbrucken, Germany

来源：

APPLIED PHYSICS LETTERS | 2017年 / 111卷 / 23期

关键词：

THIN-FILM; MULTILAYERS; SENSITIVITY; ANISOTROPY;

D O I：

10.1063/1.5003263

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Giant magnetoimpedance (GMI) measurements in the high-frequency regime utilizing a coplanar waveguide with an integrated Permalloy multilayer and micromachined on a silicon cantilever are reported. The fabrication process is described in detail. The aspect ratio of the magnetic multilayer in the magnetoresistive and magnetostrictive device was varied. Tensile strain and compressive strain were applied. Vector network analyzer measurements in the range from the skin effect to ferromagnetic resonance confirm the technological potential of GMI-based micro-electro-mechanical devices for strain and magnetic field sensing applications. The strain-impedance gauge factor was quantified by finite element strain calculations and reaches a maximum value of almost 200. Published by AIP Publishing.

引用

页数：5

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