Group IV Photonic Slot Structures for Highly Efficient Gas Sensing in mid-IR

被引：0

作者：

Passaro, Vittorio M. N. ^{[1
]}

Troia, Benedetto ^{[1
]}

De Leonardis, Francesco ^{[2
]}

机构：

[1] Politecn Bari, DEE, Photon Res Grp, Via E Orabona 4, I-70125 Bari, Italy

[2] Politecn Bari, DIASS, Photon Res Grp, I-74100 Taranto, Italy

来源：

PROCEEDINGS OF SENSORDEVICES 2011: THE SECOND INTERNATIONAL CONFERENCE ON SENSOR DEVICE TECHNOLOGIES AND APPLICATIONS | 2011年

关键词：

Silicon-on-Insulator; Photonic Sensors; Gas Sensing; Slot Waveguides; Group IV materials;

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper, novel high-performance group IV photonic structures for very efficient gas sensing are presented. Various combinations of group IV materials and alloys based on silicon (Si), germanium (Ge), tin (Sn) and carbon (C), have been studied in CMOS-compatible technology for design of optical slot waveguides for homogeneous optical sensors in mid-IR (3.39 mu m). An analysis of fabrication tolerances is presented and a comparison among different photonic sensing structures is also given. Theoretical investigation demonstrates very efficient optical field concentrations in the sensing area, as well as ultra high sensitivity of gas sensing for environmental applications.

引用

页码：103 / 108

页数：6

共 9 条

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