Large area high density quantized magnetic disks fabricated using nanoimprint lithography

被引：164

作者：

Wu, W ^{[1
]}

Cui, B ^{[1
]}

Sun, XY ^{[1
]}

Zhang, W ^{[1
]}

Zhuang, L ^{[1
]}

Kong, LS ^{[1
]}

Chou, SY ^{[1
]}

机构：

[1] Princeton Univ, Dept Elect Engn, NanoStruct Lab, Princeton, NJ 08544 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.590417

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new low-cost, high throughput method was developed for fabricating large area quantized magnetic disks (QMDs) using nanoimprint lithography (NIL), electroplating, and chemical mechanical polishing. Perpendicular QMDs with a density of 18 Gbit/in.(2) and good uniformity over an area of 4 cm x 4 cm (total 45 Gbit) have been achieved, as well as longitudinal QMDs of 30 Gbit/in.(2) The NIL molds for the perpendicular QMDs were fabricated using double NIL with a grating mold. The magnetic properties of both types of QMDs were studied by magnetic force microscopy. (C) 1998 American Vacuum Society. [S0734-211X(98)15406-9].

引用

页码：3825 / 3829

页数：5

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