Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy

被引：9

作者：

Lin, P. C. ^{[1
]}

Lin, K. F. ^{[1
]}

Chiu, C. ^{[2
]}

Semenov, V., I ^{[3
]}

Lin, H. C. ^{[1
]}

Chen, M. J. ^{[1
]}

机构：

[1] Natl Taiwan Univ, Dept Mat Sci & Engn, Taipei, Taiwan

[2] Natl Taiwan Univ Sci & Technol, Dept Mech Engn, Taipei, Taiwan

[3] Ufa State Aviat Tech Univ, Inst Phys Adv Mat, Ufa, Russia

来源：

SURFACE & COATINGS TECHNOLOGY | 2021年 / 427卷

基金：

俄罗斯基础研究基金会;

关键词：

Atomic layer deposition; Atomic layer plasma treatment; Corrosion protection; Magnesium-calcium alloy; THIN-FILMS; ZIRCONIUM-OXIDE; EFFECTIVE DIFFUSIVITY; DIELECTRIC-PROPERTIES; OXYGEN DIFFUSION; AQUEOUS-SOLUTION; MAGNESIUM; ZRO2; DENSIFICATION; DEPOSITION;

D O I：

10.1016/j.surfcoat.2021.127811

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Atomic layer plasma treatment (ALPT) enhances the corrosion protection of the ZrO2 film prepared by thermaldriven ALD mode (TALD-ZrO2) and further reduces the corrosion rate of Mg Ca alloy by more than an order of magnitude. The ALPT effect significantly increases the crystallinity and reduces the oxygen defects of TALD-ZrO2 film. The ALPT time of 30 s has the most increase in the polarization resistance of TALD-ZrO2 film, from 1.81k Omega.cm(2) to 74.71k Omega.cm(2). The enhancement of corrosion resistance of TALD-ZrO2 film caused by the 30s-ALPT is equivalent to the thickness effect of increasing the thickness from 200 cycles to 300 cycles. ALPT technique is considered as a potential and feasible method to prepare TALD-ZrO2 films with high film quality and excellent corrosion protection.

引用

页数：11

共 34 条

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