Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy

Atomic layer plasma treatment (ALPT) enhances the corrosion protection of the ZrO2 film prepared by thermaldriven ALD mode (TALD-ZrO2) and further reduces the corrosion rate of Mg Ca alloy by more than an order of magnitude. The ALPT effect significantly increases the crystallinity and reduces the oxygen defects of TALD-ZrO2 film. The ALPT time of 30 s has the most increase in the polarization resistance of TALD-ZrO2 film, from 1.81k Omega.cm(2) to 74.71k Omega.cm(2). The enhancement of corrosion resistance of TALD-ZrO2 film caused by the 30s-ALPT is equivalent to the thickness effect of increasing the thickness from 200 cycles to 300 cycles. ALPT technique is considered as a potential and feasible method to prepare TALD-ZrO2 films with high film quality and excellent corrosion protection.