Three-Dimensional Shell Fabrication Using Blow Molding of Bulk Metallic Glass

被引：67

作者：

Sarac, Baran ^{[1
]}

Kumar, Golden ^{[1
]}

Hodges, Thomas ^{[1
]}

Ding, Shiyan ^{[1
]}

Desai, Amish ^{[2
]}

Schroers, Jan ^{[1
]}

机构：

[1] Yale Univ, Dept Mech Engn & Mat Sci, New Haven, CT 06511 USA

[2] Tanner Res, Monrovia, CA 91016 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2011年 / 20卷 / 01期

基金：

美国国家科学基金会;

关键词：

Bulk metallic glass (BMG); gyroscopes; microelectromechanical systems (MEMS) devices; packaging; resonators; 3-D microshells; INTERNAL-FRICTION; MICROSTRUCTURE FABRICATION; STRUCTURAL RELAXATION; MEMS; TECHNOLOGY; SILICON; ALLOYS; CRYSTALLIZATION; THERMODYNAMICS; TEMPERATURES;

D O I：

10.1109/JMEMS.2010.2090495

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A blow molding method based on thermoplastic forming of bulk metallic glasses (BMGs) is used to fabricate 3-D microshells. The 3-D microshells are attached to the Si wafer through mechanical locking, which is achieved in the same processing step. Versatile sizes and shapes of the 3-D shells can be precisely controlled. High strength (> 1 GPa), elasticity (similar to 2%), and controlled surface roughness (< 2 nm), which are achievable for BMGs, suggest their potential use in devices, including resonators, microlenses, microfluidic, and packaging.

引用

页码：28 / 36

页数：9

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