The effect of Sn concentration on some physical properties of zinc oxide films prepared by ultrasonic spray pyrolysis

被引:41
作者
Bilgin, V [1 ]
Kose, S [1 ]
Atay, F [1 ]
Akyuz, I [1 ]
机构
[1] Osmangazi Univ, Dept Phys, TR-26480 Eskisehir, Turkey
关键词
D O I
10.1007/s10853-005-1210-x
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effect of Sri concentration on zinc oxide (ZnO) film properties has been investigated by depositing films with various Sn concentrations in the solution (Sn/Sn + Zn ratio from 0 to 50 at%) at a substrate temperature of 350 degrees C by ultrasonic spray pyrolysis (USP) technique. The deposited films were characterized for their electrical, structural, morphological and elemental properties using current-voltage and conductivity-temperature measurements, X-ray diffraction, scanning electron microscopy and energy dispersive X-ray spectroscopy. Electrical investigations showed that the resistivity of ZnO films decreases for lower Sri concentration (at 10%) and then increases for higher Sn concentration (at 30-50%). Also, depending on the increasing Sn concentration, energies of donor-like traps for ZnO films decreased and activation energy of donors for ZnO films increased. The XRD patterns showed that the as-deposited films have polycrystalline structure and the crystalline nature of the films was deteriorated with increasing Sn concentration and a shift to amorphous structure was seen. The effect of Sn concentration was to increase the surface roughening and change considerably the morphologies of ZnO films. The most homogenous surface was seen in ZnO films. EDS results showed that all elements in the starting solutions were in the solid films and Zn element is more dominant than Sn on the surfaces. After all investigations, it was determined that Sri incorporation dramatically modifies the properties of ZnO films. ZnO and ZnO:Sn (10 at%) films have a low resistivity and high transparency in the visible range and may be used as window material and antireflecting coating in solar cells while the other films may be used in gas sensors where high conductivity is unnecessary. (C) 2005 Springer Science + Business Media, Inc.
引用
收藏
页码:1909 / 1915
页数:7
相关论文
共 32 条
  • [1] About the structural, optical and electrical properties of SnO2 films produced by spray pyrolysis from solutions with low and high contents of fluorine
    Acosta, DR
    Zironi, EP
    Montoya, E
    Estrada, W
    [J]. THIN SOLID FILMS, 1996, 288 (1-2) : 1 - 7
  • [2] Compositional analysis and depth profile studies on undoped and doped tin oxide films prepared by spray technique
    Amanullah, FM
    Pratap, KJ
    Babu, VH
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 52 (2-3): : 93 - 98
  • [3] The effect of In doping on some physical properties of CdS films
    Atay, F
    Bilgin, V
    Akyuz, I
    Kose, S
    [J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2003, 6 (04) : 197 - 203
  • [4] CdS:Ni films obtained by ultrasonic spray pyrolysis:: effect of the Ni concentration
    Atay, F
    Kose, S
    Bilgin, V
    Akyuz, I
    [J]. MATERIALS LETTERS, 2003, 57 (22-23) : 3461 - 3472
  • [5] Atay F., 2002, Balkan Physics Letters, V10, P70
  • [6] Barrett C., 1966, STRUCTURE METALS, P205
  • [7] Laser annealing of zinc oxide thin film deposited by spray-CVD
    Bhaumik, GK
    Nath, AK
    Basu, S
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 52 (01): : 25 - 31
  • [8] BILGIN V, 2003, THESIS OSMANGAZI U T, P165
  • [9] Cullity BD, 1978, ELEMENTS XRAY DIFFRA
  • [10] Effect of H2 addition on characteristics of TiN films deposited by APCVD
    Huang, HH
    Hon, MH
    [J]. JOURNAL OF CRYSTAL GROWTH, 2001, 225 (2-4) : 540 - 543