The Canadian Light Source Optical Metrology Facility

被引：1
作者：
Yates, Brian
Maxwell, Dylan
Chen, Siyue
Truax, Bruce
机构：
[1] Canadian Light Source Inc, Saskatoon, SK S7N 0X4, Canada
[2] Diffraction Ltd Design LLC, Southington, CT 06489 USA
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2007年 / 582卷 / 01期
基金：
加拿大自然科学与工程研究理事会; 加拿大健康研究院;
关键词：
optical metrology; synchrotron radiation; optics;
D O I：
10.1016/j.nima.2007.08.094
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper describes the Canadian Light Source Optical Metrology Facility, in which three complementary measurement systems permit complete analysis of the synchrotron beamline optical components. A newly designed optical tip/tilt stage to handle large synchrotron mirrors will be discussed, and a new software package developed using the ROOT framework to handle curve-fitting and processing of the surface data will be presented. (C) 2007 Elsevier B.V. All rights reserved.
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页码：146 / 148
页数：3
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