Optical detection of concentrations for mixed acid: HF and HNO3

被引:1
|
作者
Kang, Gumin [1 ]
Kim, Kyoungsik [1 ]
机构
[1] Yonsei Univ, Sch Mech Engn, Seoul 120749, South Korea
来源
MULTIPHOTON MICROSCOPY IN THE BIOMEDICAL SCIENCES IX | 2009年 / 7183卷
关键词
Raman spectroscopy; Partial least square regression (PLSR); hydrofluoric acid(HF); nitric acid(HNO3); RAMAN-SPECTROSCOPY; SPECIATION;
D O I
10.1117/12.809955
中图分类号
TH742 [显微镜];
学科分类号
摘要
Mixed acid, which consist of HF and HNO3, is used as a good etchant for silicon dioxide in the wet etching and pickling process of stainless steel. The optical detection of concentration for such mixed acids is crucial to optimize and cut costs in the manufacturing process. Optical detection in the TR regime has been utilized to measure the concentration of the mixed acid for HF and HNO3, because that has several strong absorption peaks, which is contributed by vibrational mode of each acid molecular in this spectrum. In this research, we observed the concentrations of mixed acid to consist of HF and HNO3, as we measured the absorption intensity of OH- stretch and NO3- stretch band by optical spectroscopy. The concentration range of HF over 1.5-3 wt% and that of HNO3 over 2-10 wt% were studied in room temperature.
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页数:7
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