Magnesium-related shallow donor centers in silicon

被引:4
作者
Pavlov, S. G. [1 ]
Astrov, Yu. A. [2 ]
Portsel, L. M. [2 ]
Shuman, V. B. [2 ]
Lodygin, A. N. [2 ]
Abrosimov, N. V. [3 ]
Huebers, H-W [1 ,4 ]
机构
[1] German Aerosp Ctr DLR, Inst Opt Sensor Syst, Berlin, Germany
[2] Russian Acad Sci, Ioffe Inst, St Petersburg, Russia
[3] Leibniz Inst Kristallzuchtung IKZ, Berlin, Germany
[4] Humboldt Univ, Inst Phys, Berlin, Germany
关键词
Silicon; Diffusion doping; Infrared spectroscopy; OXYGEN COMPLEX IMPURITIES; INTERSTITIAL MAGNESIUM; THERMAL DONORS; STATES;
D O I
10.1016/j.mssp.2021.105833
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Magnesium (Mg) atoms, diffused in silicon (Si) lattice at high temperatures, tend to form specific bonds to host Si atoms, to other Mg atoms as well as to other defects in a Si crystal. These electrically active donors exist either as isolated atomic type centers or as complexes coupling magnesium to other trace elements in silicon. We report on shallow Mg-related donor centers in moderately doped Si:Mg crystals which are distinguished by their infrared absorption spectra. These complexes have energy spectra, relatively dense filling two separated infrared ranges, 30-95 meV and 105-130 meV, having clearly different genesis. These centers are observed in silicon of various purification degree, including high-purity crystals with low oxygen and carbon content. We assign the formation of such localized states in Si:Mg to electrically active donor complexes with different numbers of magnesium atoms, similar to those formed by interstitial oxygen in silicon. The results obtained are incorporated into the general phenomenon of formation of shallow donors in silicon which is related to interaction of impurities in the semiconductor. Subject areas: Semiconductor Physics, Diffusion Doping, Silicon.
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页数:7
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