Optimized silicon antiresonant reflecting optical waveguides for sensing applications

被引：37
作者：
Prieto, F [1 ]
Lechuga, LM
Calle, A
Llobera, A
Domínguez, C
机构：
[1] CSIC, IMM, Natl Ctr Microelect, Madrid 28760, Spain
[2] CSIC, IMB, Natl Ctr Microelect, Bellaterra 08193, Barcelona, Spain
来源：
JOURNAL OF LIGHTWAVE TECHNOLOGY | 2001年 / 19卷 / 01期
关键词：
antiresonant reflecting optical waveguide; (ARROW) theoretical design; evanescent wave sensors; Mach-Zehnder interferometer (MZI); silicon technology;
D O I：
10.1109/50.914488
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The development of an evanescent field sensor with an integrated Mach-Zehnder interferometric (MZI) configuration requires the fabrication of optical waveguides with two main characteristics: 1) monomode behavior and 2) high surface sensitivity for sensing biomolecular interactions in a direct way (without labels), In this paper, we present an experimental study for the optimization of the different parameters of the waveguides that will be the basis of a highly sensitive optical sensor. After optimization, an MZI sensor has been fabricated and some sensing applications are shown. The designed waveguides are based on antiresonant reflecting optical waveguide (ARROW) structures and are fabricated with standard silicon technology.
引用
收藏
页码：75 / 83
页数：9
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