Theoretical Analysis and Experimental Study on the Characteristics of Microprobe Vibration

被引：0
作者：
Hu, Zhao Hui [1 ]
Li, Yu He [1 ]
Guan, Kai Sen [1 ]
Qiao, Zhen Dong [1 ]
Wu, Zhen Huan [1 ]
Qiu, Yong Rong [1 ]
机构：
[1] Tsinghua Univ, Dept Precis Instrument, Beijing 100084, Peoples R China
来源：
FRONTIERS OF MANUFACTURING SCIENCE AND MEASURING TECHNOLOGY V | 2015年
关键词：
microprobe; finite element analysis; resonant frequency; spring constant;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Microprobe, a dynamical sensor, is one of the most important components of the atomic force microscope; Mechanical characteristics of atomic force microscopy including vibration resonant frequency play a utilitarian role in determining the overall performance of the atomic force microscope system. This paper was primarily concentrated on the analysis of the theoretical formulation of the microprobe's resonant frequency by using the energy relation. Finite element analysis as well as practical test were conducted in this paper. The results of the test matched the theoretical analysis perfectly, confirming the validation of the theoretical analysis.
引用
收藏
页码：93 / 97
页数：5
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