Tuning the Properties of Periodic Mesoporous Organosilica Films for Low-k Application by Gemini Surfactants

被引：2

作者：

Redzheb, Murad ^{[1
]}

Okudur, Oguzhan Orkut ^{[1
,2
]}

Bernstorff, Sigrid ^{[3
]}

Juraic, Krunoslav ^{[4
,5
]}

Van der Voort, Pascal ^{[6
]}

Armini, Silvia ^{[1
]}

机构：

[1] Kapeldreef 75, B-3001 Leuven, Belgium

[2] Katholieke Univ Leuven, Dept Mat Engn, B-3000 Leuven, Belgium

[3] Elettra Sincrotrone Trieste, Str Statale 14,Km 163-5, I-34149 Basovizza, TS, Italy

[4] Graz Univ Technol, Inst Inorgan Chem, Stremayrgasse 9-4, A-8010 Graz, Austria

[5] Rudjer Boskovic Inst, Bijenicka C 54, Zagreb 10000, Croatia

[6] Univ Ghent, COMOC, Dept Inorgan & Phys Chem, Krijgslaan 281 S3, B-9000 Ghent, Belgium

来源：

CHEMPHYSCHEM | 2018年 / 19卷 / 18期

关键词：

Gemini surfactants; mesoporous materials; organosilica; self-assembly; thin films; DIELECTRIC-CONSTANT; ELASTIC-MODULUS; THIN-FILMS; POROSITY; PMOS;

D O I：

10.1002/cphc.201800341

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Periodic mesoporous organosilica (PMO) thin films were synthesized by evaporation-induced self-assembly of 1,2-bis(triethoxysilyl)ethane and an ionic Gemini 16-12-16 surfactant under acidic conditions. The films were characterized by Fourier-transform infrared spectroscopy, grazing-incidence small-angle X-ray scattering, ellipsometric porosimetry, impedance measurements, and nanoindentation. The ease of control of the packing parameter in Gemini surfactants makes the PMO film templated by a Gemini an exciting first step towards small pore size PMO films with engineered mesostructures.

引用

页码：2295 / 2298

页数：4

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