Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

被引：15

作者：

Lu, Jian ^{[1
]}

Ikehara, Tsuyoshi ^{[1
]}

Kobayashi, Takeshi ^{[1
]}

Maeda, Ryutaro ^{[1
]}

Mihara, Takashi ^{[2
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Networked MEMS Technol Grp, Tsukuba, Ibaraki 3058564, Japan

[2] Olympus Corp, Future Creat Lab, Shinjuku Ku, Tokyo 1630914, Japan

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2007年 / 13卷 / 11-12期

关键词：

D O I：

10.1007/s00542-006-0272-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The quality factors (Q-factor) of micro cantilevers transduced by piezoelectric lead zirconate titanate (PZT) film under atmospheric pressure conditions were investigated and discussed. It was found that Q-factors increased with thicker PZT film. Due to air damping, shorter cantilevers resulted in preferred larger Q-factors. The Q-factor was found to be as high as 450 for a 150-mu m long PZT cantilever when using 1.04-mu m thick PZT film as the electromechanical conversion medium. Differences in the measured Q-factors when using integrated PZT film self-excitation and external PZT vibrator actuation indicate that energy dissipation induced by the electromechanical coupling in PZT thin films was noteworthy even under atmospheric pressure conditions. Moreover, the mechanical properties of the PZT film were found contribute significantly to decreases of the Q-factor.

引用

页码：1517 / 1522

页数：6

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