Size-controllable nanostructure array fabrication with self-assembly

被引：0
|
作者：
Haginoya, C [1 ]
Ishibashi, M [1 ]
Koike, K [1 ]
机构：
[1] Hitachi Ltd, Adv Res Lab, Hatoyama, Saitama 3500395, Japan
来源：
PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON QUANTUM CONFINEMENT: NANOSTRUCTURES | 1999年 / 98卷 / 19期
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D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Periodic array structures consisting of 100-nm-scale and 200-nm-scale in Si substrates can be fabricated by combining the self-assembly of polystyrene spheres with reactive ion etching. We show here that the period and hole size can be determined independently. This relatively low cost and easy to use fabrication method is applicable in many areas of science and technology.
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页码：335 / 347
页数：13
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