Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange

被引：0
作者：
Chang, KS
Aronova, MA
Takeuchi, I [1 ]
机构：
[1] Univ Maryland, Dept Phys, Small Smart Syst Ctr, Dept Mat Sci & Engn, College Pk, MD 20742 USA
[2] Univ Maryland, Dept Phys, Ctr Superconduct Res, College Pk, MD 20742 USA
来源：
APPLIED SURFACE SCIENCE | 2004年 / 223卷 / 1-3期
关键词：
pulsed laser deposition; high-throughout; thin-film;
D O I：
10.1016/S0169-4332(03)00926-7
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
We describe the design and operation of our high-throughput thin-film deposition flange which is used to perform combinatorial pulsed laser deposition (PLD). The portable flange allows us to "convert" different PLD systems into combinatorial PLD systems. The use of the flange is illustrated in fabrication of a discrete gas sensor library and an epitaxial composition spread. (C) 2003 Published by Elsevier B.V.
引用
收藏
页码：224 / 228
页数：5
相关论文
共 12 条
  • [1] ARONOVA MA, UNPUB
  • [2] AUCIELLO O, 1992, MULTICOMPONENT MULTI, P230
  • [3] Vapor deposition of intact polyethylene glycol thin films
    Bubb, DM
    Ringeisen, BR
    Callahan, JH
    Galicia, M
    Vertes, A
    Horwitz, JS
    McGill, RA
    Houser, EJ
    Wu, PK
    Piqué, A
    Chrisey, DB
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 73 (01): : 121 - 123
  • [4] Multimode quantitative scanning microwave microscopy of in situ grown epitaxial Ba1-xSrxTiO3 composition spreads
    Chang, KS
    Aronova, M
    Famodu, O
    Takeuchi, I
    Lofland, SE
    Hattrick-Simpers, J
    Chang, H
    [J]. APPLIED PHYSICS LETTERS, 2001, 79 (26) : 4411 - 4413
  • [5] Chrisey D. B., 1994, PULSED LASER DEPOSIT
  • [6] Current trends in 'artificial-nose' technology
    Dickinson, TA
    White, J
    Kauer, JS
    Walt, DR
    [J]. TRENDS IN BIOTECHNOLOGY, 1998, 16 (06) : 250 - 258
  • [7] Rapid construction of a phase diagram of doped Mott insulators with a composition-spread approach
    Fukumura, T
    Ohtani, M
    Kawasaki, M
    Okimoto, Y
    Kageyama, T
    Koida, T
    Hasegawa, T
    Tokura, Y
    Koinuma, H
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (21) : 3426 - 3428
  • [8] GARDNER JW, 1994, SENSOR ACTUAT B-CHEM, V18, P211
  • [9] Microstructure and dielectric properties of Ba1-xSrxTiO3 films grown on LaAlO3 substrates
    Gim, Y
    Hudson, T
    Fan, Y
    Kwon, C
    Findikoglu, AT
    Gibbons, BJ
    Park, BH
    Jia, QX
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (08) : 1200 - 1202
  • [10] Measurements of VOCs with a semiconductor electronic nose
    Horrillo, MC
    Getino, J
    Ares, L
    Robla, JI
    Sayago, I
    Gutierrez, FJ
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (07) : 2486 - 2489
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