A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation

被引：0
作者：
Shan, Weiwei [1 ]
Chen, Xin [2 ]
机构：
[1] Southeast Univ, Natl ASIC Syst Engn Res Ctr, Nanjing 210096, Peoples R China
[2] Nanjing Univ Aeronaut & Astronaut, Nanjing 210016, Peoples R China
来源：
IEICE TRANSACTIONS ON ELECTRONICS | 2011年 / E94C卷 / 09期
基金：
中国国家自然科学基金;
关键词：
MEMS micro-mirror; electrostatic actuation; closed-loop control; PULL-IN; TRAVEL; RANGE;
D O I：
10.1587/transele.E94.C.1486
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this brief paper, both static and dynamic behaviors of an electrostatic-actuated MEMS mirror are modeled and studied. To overcome the intrinsic pull-in problem and the dynamic disadvantages in the open-loop controlled actuation, a novel closed-loop feedback control method is proposed assuming the mirror tilt angle can be measured. First, a fixed voltage slightly higher than the pull-in voltage is applied when the mirror tilt angle is small. Then Proportional-Derivative (PD) control is used when the mirror is approaching the target position. Simulink simulation results show that this combined PD closed-loop control can overcome the pull-in problem and improve the dynamic behavior: furthermore, it can also enhance the robustness of the mirror actuation system to overcome environmental disturbances.
引用
收藏
页码：1486 / 1489
页数：4
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