共 12 条
[7]
Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2000, 18 (04)
:1533-1537
[9]
MUNZ WD, 1986, J VAC SCI TECHNOL A, V4, P2717, DOI 10.1116/1.573713