共 27 条
- [22] Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor Journal of Materials Science, 2016, 51 : 5082 - 5091
- [24] Enhanced dielectric properties in SrTiO3/BaTiO3 strained superlattice structures prepared by atomic-layer metalorganic chemical vapor deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (12A): : 6817 - 6820
- [25] Influence of Nitrogen Annealing Treatment on Optical, Microstructural, and Chemical Properties of Ga2O3 Film Grown by Plasma-Enhanced Atomic Layer Deposition JOURNAL OF PHYSICAL CHEMISTRY C, 2023, 127 (22): : 10688 - 10698
- [26] Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2017, 35 (03):