Structure and Tribological Characterization of TiB2/TiBN Multilayer Coatings Deposited by Magnetron Sputtering

被引：0

作者：

Lin, W. S. ^{[1
]}

Chen, J. ^{[1
]}

Zhou, J. ^{[1
]}

机构：

[1] Shanghai Univ Engn Sci, Sch Mat Engn, Shanghai 201620, Peoples R China

来源：

ADVANCED TRIBOLOGY | 2009年

关键词：

Magnetron sputtering; Multilayer coating; Tribological properties; TiB(2)/TiBN; TI-B-N; FILMS;

D O I：

10.1007/978-3-642-03653-8_212

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

TiB(2)/TiBN multilayer coatings were deposited on Si(100) wafers by reactive magnetron sputtering technology. The microstructure and microhardness of the multilayer coatings have been studied with X-ray diffraction (XRD), atomic force microscopy (AFM) and microhardness tester. The friction and wear behaviors of the multilayer coatings sliding against Al(2)O(3) balls were evaluated on a pin-on-disc tribometer under dry friction condition. The results showed that the single layer TiB(2) consists of a hexagonal TiB2 phase with the strong (001) texture, and the Ti-B-N film is XRD-amorphous. Structural analysis confirmed that (001) preferential orientation of TiB2 phase is reduced, and the crystal structure of TiBN existed in the structure of TiB2/TiBN multilayer coatings. The smallest friction coefficient and the best wear resistance were measured in TiB2/TiBN multilayer coatings with the modulation of 30 nm.

引用

页码：651 / 653

页数：3

共 10 条

[1] Dislocation-based deformation mechanisms in metallic nanolaminates [J].

Anderson, PM ;

Foecke, T ;

Hazzledine, PM .

MRS BULLETIN, 1999, 24 (02) :27-33

[2] Deposition of TiN/CrN hard superlattices by reactive d.c. magnetron sputtering [J].

Barshilia, HC ;

Rajam, KS .

BULLETIN OF MATERIALS SCIENCE, 2003, 26 (02) :233-237

[3] Deposition of Ti-B-N films by ICP assisted sputtering [J].

Jung, DH ;

Kim, H ;

Lee, GR ;

Park, B ;

Lee, JJ ;

Joo, JH .

SURFACE & COATINGS TECHNOLOGY, 2003, 174 :638-642

[4] Low-stress superhard Ti-B films prepared by magnetron sputtering [J].

Kunc, F ;

Musil, J ;

Mayrhofer, PH ;

Mitterer, C .

SURFACE & COATINGS TECHNOLOGY, 2003, 174 :744-753

[5] Microstructure and properties of nanocomposite Ti-B-N and Ti-B-C coatings [J].

Mitterer, C ;

Mayrhofer, PH ;

Beschliesser, M ;

Losbichler, P ;

Warbichler, P ;

Hofer, F ;

Gibson, PN ;

Gissler, W ;

Hruby, H ;

Musil, J ;

Vlcek, J .

SURFACE & COATINGS TECHNOLOGY, 1999, 120 :405-411

[6] Ward and superhard Zr-Ni-N nanocomposite films [J].

Musil, J ;

Karvánková, P ;

Kasl, J .

SURFACE & COATINGS TECHNOLOGY, 2001, 139 (01) :101-109

[7] Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2 nanocomposites with Hv=80 to ≤ 105 GPa [J].

Veprek, S ;

Niederhofer, A ;

Moto, K ;

Bolom, T ;

Männling, HD ;

Nesladek, P ;

Dollinger, G ;

Bergmaier, A .

SURFACE & COATINGS TECHNOLOGY, 2000, 133 :152-159

[8]

XU J, 2003, J MATER SCI, V35, P3535

[9] Recent advances of superhard nanocomposite coatings: a review [J].

Zhang, S ;

Sun, D ;

Fu, YQ ;

Du, HJ .

SURFACE & COATINGS TECHNOLOGY, 2003, 167 (2-3) :113-119

[10] Effect of SiO2 crystallization on AlN/SiO2 nano-multilayers with superhardness effect [J].

Zhao Wen-Ji ;

Kong Ming ;

Huang Bi-Long ;

Li Ge-Yang .

ACTA PHYSICA SINICA, 2007, 56 (03) :1574-1580

← 1 →