Heteroepitaxial Growth of Ge Nanowires on Si Substrates

被引:2
作者
Artoni, Pietro [1 ,2 ]
Irrera, Alessia [1 ]
Pecora, Emanuele Francesco [1 ,2 ]
Boninelli, Simona [1 ]
Spinella, Corrado [3 ]
Priolo, Francesco [1 ,2 ]
机构
[1] MATIS IMM CNR, I-95123 Catania, Italy
[2] Univ Catania, Dipartimento Fis & Astron, I-95123 Catania, Italy
[3] IMM CNR, I-95121 Catania, Italy
关键词
EPITAXY; SHAPE;
D O I
10.1155/2012/782835
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Electron beam evaporation has been used to prepare Ge nanowires (NWs) on top of (111) Si substrates. Despite the non-UHV growth conditions, scanning and transmission electron microscopies demonstrate that NWs are single crystal with specific crystallographic growth directions ([111], [110], and [112]). NWs are faceted, exhibiting the lower energy plans on the surface. The faceting depends on the growth direction. Moreover, the detrimental effects for Ge NWs growth of O atoms contamination are discussed. Finally, we describe how a proper preparation of the Au catalyst is able to increase the Ge NW density by a factor of 4, while heteroepitaxy and faceting features are maintained.
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页数:5
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