Study of sol-gel ZrO2 thin film with high laser damage thresholds

被引:0
作者
Li Haiyuan [1 ]
Tang Yongxing [1 ]
Hu Lili [1 ]
机构
[1] Shanghai Inst Opt & Fine Mech, High Power Laser Phys Natl Lab, Shanghai 201800, Peoples R China
关键词
sol-gel; laser induced damage threshold; thin film; ZrO2; ZrOCl2 center dot 8H(2)O;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
ZrO2 Sol was prepared by controlling hydrolysis ZrOCl2 center dot 8H(2)O in heated alcoholic solution. The thin films were deposited by dip technique. The characterization of ZrO2 Sol was analyzed by viscosity, particle size analyzer, IR, DSC and AFM analysis. The results showed that the average size of sol particles was 18.9 nm; the refractive index of coatings treated at 300 degrees C was 1.95; the morphology of coatings surface was smooth, and its average roughness was only 0.561 nm. The laser induced damage threshold of ZrO2 coating was 14 j/cm(2) (1064 nm, 1 ns).
引用
收藏
页码:185 / 187
页数:3
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