Status of the growth and fabrication of AlGaN-based UV laser diodes for near and mid-UV wavelength

被引:25
作者
Kirste, Ronny [1 ,2 ]
Sarkar, Biplab [1 ,3 ]
Reddy, Pramod [1 ,2 ]
Guo, Qiang [1 ]
Collazo, Ramon [1 ]
Sitar, Zlatko [1 ]
机构
[1] North Carolina State Univ, Dept Mat Sci & Engn, Box 7907, Raleigh, NC 27695 USA
[2] Adroit Mat, Cary, NC USA
[3] Indian Inst Technol, Dept Elect & Commun Engn, Roorkee 247667, Uttarakhand, India
基金
美国国家科学基金会;
关键词
Laser; Optoelectronic; Electrical properties; Optical properties; Dopant; RESONANCE RAMAN-SPECTROSCOPY; CONTINUOUS-WAVE OPERATION; BULK ALUMINUM NITRIDE; LIGHT-EMITTING-DIODES; MG-DOPED GAN; STIMULATED-EMISSION; OHMIC CONTACTS; ELECTRICAL-PROPERTIES; ALN/ALGAN SUPERLATTICES; ALN/SAPPHIRE TEMPLATES;
D O I
10.1557/s43578-021-00443-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this article, the development of mid-UV laser diodes based on the AlGaN materials system is reviewed. The targeted wavelength for these lasers covers the range from 200 to 350 nm. After introducing UV laser diodes and explaining their applications, the challenges in growth, design, and fabrication are discussed. In addition, recent results from optically and electrically injected UV laser diodes are presented. Finally, we will discuss possible pathways to improve performance and give an outlook on the expected development of UV laser diodes in the near future.
引用
收藏
页码:4638 / 4664
页数:27
相关论文
共 228 条
[1]   Suppression of Mg propagation into subsequent layers grown by MOCVD [J].
Agarwal, Anchal ;
Tahhan, Maher ;
Mates, Tom ;
Keller, Stacia ;
Mishra, Umesh .
JOURNAL OF APPLIED PHYSICS, 2017, 121 (02)
[2]   Low-resistance GaN tunnel homojunctions with 150 kA/cm2 current and repeatable negative differential resistance [J].
Akyol, Fatih ;
Krishnamoorthy, Sriram ;
Zhang, Yuewei ;
Johnson, Jared ;
Hwang, Jinwoo ;
Rajan, Siddharth .
APPLIED PHYSICS LETTERS, 2016, 108 (13)
[3]  
ALFEROV ZI, 1971, SOV PHYS SEMICOND+, V4, P1573
[4]   Growth and characterization of Mg-doped AlGaN-AlN short-period superlattices for deep-UV optoelectronic devices [J].
Allerman, A. A. ;
Crawford, M. H. ;
Miller, M. A. ;
Lee, S. R. .
JOURNAL OF CRYSTAL GROWTH, 2010, 312 (06) :756-761
[5]   Growth and design of deep-UV (240-290 nm) light emitting diodes using AlGaN alloys [J].
Allerman, AA ;
Crawford, MH ;
Fischer, AJ ;
Bogart, KHA ;
Lee, SR ;
Follstaedt, DM ;
Provencio, PP ;
Koleske, DD .
JOURNAL OF CRYSTAL GROWTH, 2004, 272 (1-4) :227-241
[6]   ROOM-TEMPERATURE LOW-THRESHOLD SURFACE-STIMULATED EMISSION BY OPTICAL-PUMPING FROM AL0.1GA0.9N/GAN DOUBLE-HETEROSTRUCTURE [J].
AMANO, H ;
WATANABE, N ;
KOIDE, N ;
AKASAKI, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (7B) :L1000-L1002
[7]  
Amano H, 1999, PHYS STATUS SOLIDI B, V216, P683, DOI 10.1002/(SICI)1521-3951(199911)216:1<683::AID-PSSB683>3.0.CO
[8]  
2-4
[9]   P-TYPE CONDUCTION IN MG-DOPED GAN TREATED WITH LOW-ENERGY ELECTRON-BEAM IRRADIATION (LEEBI) [J].
AMANO, H ;
KITO, M ;
HIRAMATSU, K ;
AKASAKI, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (12) :L2112-L2114
[10]   Two-dimensional electron gases induced by spontaneous and piezoelectric polarization charges in N- and Ga-face AlGaN/GaN heterostructures [J].
Ambacher, O ;
Smart, J ;
Shealy, JR ;
Weimann, NG ;
Chu, K ;
Murphy, M ;
Schaff, WJ ;
Eastman, LF ;
Dimitrov, R ;
Wittmer, L ;
Stutzmann, M ;
Rieger, W ;
Hilsenbeck, J .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (06) :3222-3233