High Dynamic Range 6-Axis Force Sensor Employing a Semiconductor-Metallic Foil Strain Gauge Combination

被引：24

作者：

Tamura, Ryuya ^{[1
]}

Horikoshi, Tomoki ^{[1
]}

Sakaino, Sho ^{[2
]}

Tsuji, Toshiaki ^{[1
]}

机构：

[1] Saitama Univ, Dept Elect Engn Elect & Appl Phys, Saitama 3388570, Japan

[2] Univ Tsukuba, Grad Sch Syst & Informat Engn, Ibaraki 3058577, Japan

来源：

IEEE ROBOTICS AND AUTOMATION LETTERS | 2021年 / 6卷 / 04期

关键词：

Force sensing; force sensor; strain gauge; tactile sensing; force control; DESIGN;

D O I：

10.1109/LRA.2021.3093008

中图分类号：

TP24 [机器人技术];

学科分类号：

080202 ; 1405 ;

摘要：

This letter proposes a force sensor that combines semiconductor strain gauges and metallic foil strain gauges to present force information of a higher dynamic range to robots. The strain gauges have different sensitivities, with semiconductor strain gauge sensitivity being approximately 90-fold than that of the metallic foil strain gauges. Using this difference in sensitivity, large forces and small forces are both detected through the two types of strain gauges and high dynamic range force detection is achieved by combining the output signals of these two. It was confirmed from the SN ratio test that the proposed sensor has a measurement range from 0.005 N to 1000 N, the maximum load. The dynamic range is 2x10(5), extending the dynamic range of the 6-axis force sensor with the highest range in previous studies two-fold.

引用

页码：6243 / 6249

页数：7

共 18 条

[1] A Six-Axis MEMS Force-Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution [J].

Beyeler, Felix ;

Muntwyler, Simon ;

Nelson, Bradley J. .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2009, 18 (02) :433-441

[2] Hand exoskeleton for rehabilitation therapies with integrated optical force sensor [J].

Diez, Jorge A. ;

Blanco, Andrea ;

Maria Catalan, Jose ;

Badesa, Francisco J. ;

Daniel Lledo, Luis ;

Garcia-Aracil, Nicolas .

ADVANCES IN MECHANICAL ENGINEERING, 2018, 10 (02)

[3]

Hanyu Ryosuke, 2010, Proceedings of the 11th IEEE International Workshop on Advanced Motion Control (AMC 2010), P691, DOI 10.1109/AMC.2010.5464045

[4] Optimum Design of a Dual-Range Force Sensor for Achieving High Sensitivity, Broad Bandwidth, and Large Measurement Range [J].

Jiang, Jun ;

Chen, Weihai ;

Liu, Jingmeng ;

Chen, Wenjie ;

Zhang, Jianbin .

IEEE SENSORS JOURNAL, 2015, 15 (02) :1114-1123

[5]

Jiang J, 2013, C IND ELECT APPL, P188

[6]

Kim K. S., 2013, REV SCI INSTRUMENTS, V84, P77

[7] Design and fabrication of a six-dimensional wrist force/torque sensor based on E-type membranes compared to cross beams [J].

Liang, Qiaokang ;

Zhang, Dan ;

Song, Quanjun ;

Ge, Yunjian ;

Cao, Huibin ;

Ge, Yu .

MEASUREMENT, 2010, 43 (10) :1702-1719

[8]

Liljebäck P, 2012, IEEE INT C INT ROBOT, P4898, DOI 10.1109/IROS.2012.6386115

[9] Flexible Normal-Tangential Force Sensor with Opposite Resistance Responding for Highly Sensitive Artificial Skin [J].

Mu, Chunhong ;

Song, Yuanqiang ;

Huang, Wutong ;

Ran, Ao ;

Sun, Rujie ;

Xie, Weihua ;

Zhang, Huaiwu .

ADVANCED FUNCTIONAL MATERIALS, 2018, 28 (18)

[10] Wide Range Load Sensor Using Quartz Crystal Resonator for Detection of Biological Signals [J].

Murozaki, Yuichi ;

Arai, Fumihito .

IEEE SENSORS JOURNAL, 2015, 15 (03) :1913-1919

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