Advancing decal-transfer lithography with a reusable PDMS-coated nanoscale stamp

被引：13

作者：

Kim, Mihee

Kim, Youn Sang

机构：

[1] Ewha Womans Univ, Div Nano Sci, Seoul 120750, South Korea

[2] Ewha Womans Univ, Dept Chem, Seoul 120750, South Korea

来源：

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY | 2007年 / 129卷 / 37期

关键词：

SOFT LITHOGRAPHY; HIGH-RESOLUTION; POLY(DIMETHYLSILOXANE); FABRICATION; SURFACES; MOLDS;

D O I：

10.1021/ja072981m

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We present nanoscale decal transfer lithography (DTL) in which the conventional poly(dimethylsiloxane) (PDMS) stamp is alternated with a reusable PDMS-coated nanoscale stamp. Owing to the PDMS thin layer coating strategy, we were able to promote the capability of conventional DTL. First, we succeeded in progressing toward a DTL process that extends to the nanometer scale. Second, we were able to empower the DTL stamp to be used several times.

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页码：11304 / +

页数：3

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