A strategy for increased carbon ionization in magnetron sputtering discharges

被引：98

作者：

Aijaz, Asim ^{[1
]}

Sarakinos, Kostas ^{[1
]}

Lundin, Daniel ^{[1
]}

Brenning, Nils ^{[1
,2
]}

Helmersson, Ulf ^{[1
]}

机构：

[1] Linkoping Univ, IFM Mat Phys, Plasma & Coatings Phys Div, SE-58183 Linkoping, Sweden

[2] Royal Inst Technol, Sch Elect Engn, Div Space & Plasma Phys, SE-10044 Stockholm, Sweden

来源：

基金：

瑞典研究理事会;

关键词：

HiPIMS; HPPMS; Carbon ionization; Tetrahedral amorphous carbon; Diamond-like carbon; PHYSICAL VAPOR-DEPOSITION; EVOLUTION; FLUX;

D O I：

10.1016/j.diamond.2011.12.043

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A strategy that facilitates a substantial increase of carbon ionization in magnetron sputtering discharges is presented in this work. The strategy is based on increasing the electron temperature in a high power impulse magnetron sputtering discharge by using Ne as the sputtering gas. This allows for the generation of an energetic C+ ion population and a substantial increase in the C+ ion flux as compared to a conventional Ar-HiPIMS process. A direct consequence of the ionization enhancement is demonstrated by an increase in the mass density of the grown films up to 2.8 g/cm(3); the density values achieved are substantially higher than those obtained from conventional magnetron sputtering methods. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：1 / 4

页数：4

共 23 条

[1]

Aichmayr G., 2007, IEEE S VLSI TECHN, V49, P186

[2] Dual-magnetron open field sputtering system for sideways deposition of thin films [J].

Aijaz, Asim ;

Lundin, Daniel ;

Larsson, Petter ;

Helmersson, Ulf .

SURFACE & COATINGS TECHNOLOGY, 2010, 204 (14) :2165-2169

[3] Guiding the deposition flux in an ionized magnetron discharge [J].

Bohlmark, J. ;

Ostbye, M. ;

Lattemann, M. ;

Ljunguantz, H. ;

Rosell, T. ;

Helmersson, U. .

THIN SOLID FILMS, 2006, 515 (04) :1928-1931

[4] The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge [J].

Bohlmark, J. ;

Lattemann, M. ;

Gudmundsson, J. T. ;

Ehiasarian, A. P. ;

Gonzalvo, Y. Aranda ;

Brenning, N. ;

Helmersson, U. .

THIN SOLID FILMS, 2006, 515 (04) :1522-1526

[5] Diamond-like carbon for data and beer storage [J].

Casiraghi, Cinzia ;

Robertson, John ;

Ferrari, Andrea C. .

MATERIALS TODAY, 2007, 10 (1-2) :44-53

[6] Nanomechanical and nanotribological properties of carbon-based thin films: A review [J].

Charitidis, C. A. .

INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2010, 28 (01) :51-70

[7]

Dekoven B.M., 2003, 46 SVC TECHNICAL C P, P158

[8] Diamond-like carbon for magnetic storage disks [J].

Ferrari, AC .

SURFACE & COATINGS TECHNOLOGY, 2004, 180 :190-206

[9] Density, sp3 fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy [J].

Ferrari, AC ;

Li Bassi, A ;

Tanner, BK ;

Stolojan, V ;

Yuan, J ;

Brown, LM ;

Rodil, SE ;

Kleinsorge, B ;

Robertson, J .

PHYSICAL REVIEW B, 2000, 62 (16) :11089-11103

[10] CROSS-SECTION MEASUREMENTS FOR ELECTRON-IMPACT IONIZATION OF ATOMS [J].

FREUND, RS ;

WETZEL, RC ;

SHUL, RJ ;

HAYES, TR .

PHYSICAL REVIEW A, 1990, 41 (07) :3575-3595

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