Lithium aluminosilicate glass-ceramic containing Na2O for low-temperature anodic bonding in microelectronic mechanical systems

被引：16

作者：

Huang, Yourong ^{[1
]}

Cui, Zhu ^{[1
]}

Gao, Xiping ^{[1
]}

Li, Changjiu ^{[1
]}

Gu, Zhenan ^{[1
]}

机构：

[1] China Bldg Mat Acad, Quartz Glass Dept, Quartz & Special Glass Inst, Beijing 100024, Peoples R China

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 2008年 / 354卷 / 12-13期

关键词：

glass-ceramics; conductivity; microstructure; microcrystallinity; thermal properties;

D O I：

10.1016/j.jnoncrysol.2007.02.093

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this study, one kind of lithium aluminosilicate-beta-quartz glass-ceramic containing Na2O has been chosen, which can be used for low-temperature bonding with a higher bonding rate for the manufacture of microelectronic mechanical systems. The microstructure of the glass-ceramic is analyzed by transmission electron microscopy, high resolution transmission electron microscopy, selected-area diffraction, energy dispersive spectrometry and X-ray diffraction. The influence of the heat treatment process of the glass on the properties and the microstructure of the glass-ceramics is discussed. The microstructure of the glass-ceramic has the continuous glassy region with higher alkali metal ion content, which benefits the low-temperature anodic bonding. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：1407 / 1410

页数：4