Ca2Si(100) epitaxial films on the Si(111) substrate: Template growth, structural and optical properties

被引:9
作者
Galkin, Nikolay G. [1 ]
Galkin, Konstantin N. [1 ]
Dotsenko, Sergey A. [1 ]
Pyachin, Sergey A. [2 ]
Astapov, Ivan A. [2 ]
机构
[1] Russian Acad Sci, Inst Automat & Control Proc, Lab Opt & Electrophys, Far Eastern Branch, Radio Str 5, Vladivostok 690041, Russia
[2] Russian Acad Sci, Khabarovsk Sci Ctr, Inst Mat Sci, Lab Funct Mat & Coatings,Far Eastern Branch, Tikhookeanskaya Str 153, Khabarovsk 680042, Russia
关键词
Ca2Si films; Template; Epitaxy; Crystal structure; Optical properties; Phonon structure; ELECTRONIC-PROPERTIES; ELECTRICAL-PROPERTIES; SILICIDE; PHASE; CASI2; DENSITY; LAYERS; BULK; CA;
D O I
10.1016/j.mssp.2020.105036
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Thick epitaxial Ca2Si(100) films were first grown on Si(111) substrates by forming a sacrificial Mg2Si(111) template and converting it into the Ca2Si template. It was found that a temperature of 250 degrees C is sufficient to transfer it into the Ca2Si template with sufficient uniformity. During Ca and Si co-deposition at 250 degrees C, epitaxial Ca2Si(100) domains with two orientations are formed in a thin (100 nm) film, and increasing the substrate temperature to 300 degrees C leads to a deterioration in the Ca2Si crystalline quality due to a partial violation of its continuity and grain growth of the CaSi phase from Si substrate. An increase in the film thickness to 400 nm at 250 degrees C led to the appearance, in addition to the Ca2Si(100) epitaxial phase, of the second Ca2Si(010) epitaxial phase with both contributing to the LEED pattern. From the transmission and reflection spectra of the grown samples, it was found that Ca2Si film has a first direct interband transition at E-1d = 1.095 +/- 0.15 eV, strong defect adsorption lower 1.0 eV and dispersionless refractive index n(o) <= 3.8. Eight Raman peaks and 6 FIR peaks were first registered and identified, which are in good agreement with theoretical calculations. The absorption coefficients characteristic of FIR peaks was determined, which can be used further in the quick estimation of the thickness of Ca2Si films through an intensity of FIR absorption peaks.
引用
收藏
页数:12
相关论文
共 37 条
[1]   New superconducting CaSi2 phase with Tc up to 14K under pressure [J].
Affronte, M ;
Sanfilippo, S ;
Nuñez-Regueiro, M ;
Laborde, O ;
Le Floch, S ;
Bordet, P ;
Hanfland, M ;
Levi, D ;
Palenzona, A ;
Olcese, GL .
PHYSICA B-CONDENSED MATTER, 2000, 284 :1117-1118
[2]   Low temperature properties of calcium mono- and disilicides [J].
Affronte, M ;
Laborde, O ;
Olcese, GL ;
Palenzona, A .
JOURNAL OF ALLOYS AND COMPOUNDS, 1998, 274 (1-2) :68-73
[3]  
[Anonymous], 2006, Thermoelectrics Handbook: Macro to Nano, DOI DOI 10.1201/9781420038903
[4]  
Bonch-Bruevich V.L., 1977, PHYS SEMICONDUCTORS, P632
[5]  
Born M., 1980, Principles of Optics, P836
[6]  
BUSCH G, 1954, HELV PHYS ACTA, V27, P193
[7]   Growth, optical and electrical properties of Ca2Si film grown on Si(111) and Mg2Si/Si(111) substrates [J].
Dotsenko, S. A. ;
Fomin, D. V. ;
Galkin, K. N. ;
Goroshko, D. L. ;
Galkin, N. G. .
ASIA-PACIFIC CONFERENCE ON SEMICONDUCTING SILICIDES SCIENCE AND TECHNOLOGY TOWARDS SUSTAINABLE OPTOELECTRONICS (APAC-SILICIDE 2010), 2011, 11 :95-98
[8]   Formation and characterization of semiconductor Ca2Si layers prepared on p-type silicon covered by an amorphous silicon cap [J].
Dozsa, L. ;
Molnar, G. ;
Zolnai, Z. ;
Dobos, L. ;
Pecz, B. ;
Galkin, N. G. ;
Dotsenko, S. A. ;
Bezbabny, D. A. ;
Fomin, D. V. .
JOURNAL OF MATERIALS SCIENCE, 2013, 48 (07) :2872-2882
[9]  
Ertl G., 1985, LOW ENERGY ELECT SUR, P210
[10]   A study of the temperature dependence of adsorption and silicidation kinetics at the Mg/Si(111) interface [J].
Galkin, K. N. ;
Kumar, Mahesh ;
Govind ;
Shivaprasad, S. M. ;
Korobtsov, Vv. ;
Galkin, N. G. .
THIN SOLID FILMS, 2007, 515 (22) :8192-8196