Nanoscale domain patterning of lead zirconate titanate materials using electron beams

被引：27

作者：

Ferris, JH ^{[1
]}

Li, DB ^{[1
]}

Kalinin, SV ^{[1
]}

Bonnell, DA ^{[1
]}

机构：

[1] Univ Penn, Dept Mat Sci & Engn, Philadelphia, PA 19104 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 84卷 / 05期

关键词：

D O I：

10.1063/1.1644327

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The interactions of electron beams (e(-) beam) with ferroelectric oxides based on lead zirconate titanate have been quantified. The beam energy and dose dependencies of surface charge have been manipulated to influence local polarization orientation. The mechanism of ferroelectric domain polarization of 100 nm grains in lead zirconate titanate is discussed in terms of electron-solid interactions and the relative number of secondary electrons emitted to trapped electrons. Both positive and negative perpendicular polarization can be realized with e(-) beam exposure. The consequent nanoscale domain patterning is characterized with piezoforce microscopy. (C) 2004 American Institute of Physics.

引用

页码：774 / 776

页数：3

共 18 条

[1] Local, nonvolatile electronic writing of epitaxial Pb(Zr0.52Ti0.48)O-3/SrRuO3 heterostructures
Ahn, CH
Tybell, T
Antognazza, L
Char, K
Hammond, RH
Beasley, MR
Fischer, O
Triscone, JM
[J]. SCIENCE, 1997, 276 (5315) : 1100 - 1103
[2] Patterning and switching of nano-size ferroelectric memory cells
Alexe, M
Harnagea, C
Visinoiu, A
Pignolet, A
Hesse, D
Gösele, U
[J]. SCRIPTA MATERIALIA, 2001, 44 (8-9) : 1175 - 1179
[3] Reproducible switching effect in thin oxide films for memory applications
Beck, A
Bednorz, JG
Gerber, C
Rossel, C
Widmer, D
[J]. APPLIED PHYSICS LETTERS, 2000, 77 (01) : 139 - 141
[4] Activation field and fatigue of (Pb, La)(Zr, Ti)O3 thin films
Chen, IW
Wang, Y
[J]. APPLIED PHYSICS LETTERS, 1999, 75 (26) : 4186 - 4188
[5] Nanoscale imaging of domain dynamics and retention in ferroelectric thin films
Gruverman, A
Tokumoto, H
Prakash, AS
Aggarwal, S
Yang, B
Wuttig, M
Ramesh, R
Auciello, O
Venkatesan, T
[J]. APPLIED PHYSICS LETTERS, 1997, 71 (24) : 3492 - 3494
[6] GRUVERMAN X, IN PRESS SCANNING PR
[7] DOMAIN INVERSION IN KTIOPO4 USING ELECTRON-BEAM SCANNING
GUPTA, MC
RISK, WP
NUTT, ACG
LAU, SD
[J]. APPLIED PHYSICS LETTERS, 1993, 63 (09) : 1167 - 1169
[8] A METHOD OF POLING LINBO3 AND LITAO3 BELOW TC
HAYCOCK, PW
TOWNSEND, PD
[J]. APPLIED PHYSICS LETTERS, 1986, 48 (11) : 698 - 700
[9] DOMAIN INVERSION IN LITAO3 BY ELECTRON-BEAM
HSU, WY
GUPTA, MC
[J]. APPLIED PHYSICS LETTERS, 1992, 60 (01) : 1 - 3
[10] JOY DC, 2001, DATABASE ELECT SOLID

← 1 2 →