Compact high-resolution micro-spectrometer on chip: spectral calibration and first spectrum

被引:9
作者
Diard, Thomas [1 ,2 ]
de la Barriere, Florence [1 ]
Ferrec, Yann [1 ]
Guerineau, Nicolas [1 ]
Rommeluere, Sylvain [1 ]
le Coarer, Etienne [2 ]
Martin, Guillermo [2 ]
机构
[1] Off Natl Etud & Rech Aerosp, Chemin Huniere, F-91120 Palaiseau, France
[2] IPAG, 414 Rue Piscine Domaine Univ, F-38041 Grenoble, France
来源
MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS VIII | 2016年 / 9836卷
关键词
Fourier Transform Spectrometry; Micro Spectrometer; High Spectral Resolution;
D O I
10.1117/12.2223692
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Compact and hand-held spectrometers may be very interesting for the measurement of spectral signatures of chemicals or objects. To achieve this goal, ONERA and IPAG have developed a new on chip Fourier Transform Spectrometer operating in the visible spectral range with a high spectral resolution (near 2 cm(-1)), named visible HR SPOC (visible High Resolution Spectrometer On Chip). It is directly inspired from the MICROSPOC infrared spectrometer, studied at ONERA in the past years. This spectrometer is made of a stair-step two-wave interferometer directly glued on a CMOS detector making it a very compact prototype. After calibrating the optical path difference, measurements of experimental spectra are presented.
引用
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页数:7
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