Ultrasensitive Refractive Index Sensing Based on the Quasi-Bound States in the Continuum of All-Dielectric Metasurfaces

被引:94
作者
Hsiao, Hui-Hsin [1 ,2 ,3 ]
Hsu, Yi-Chien [2 ]
Liu, Ai-Yin [2 ]
Hsieh, Jou-Chun [2 ]
Lin, Yu-Hsin [3 ]
机构
[1] Natl Taiwan Univ, Dept Engn Sci & Ocean Engn, Taipei 10617, Taiwan
[2] Natl Taiwan Normal Univ, Inst Electroopt Engn, Taipei 11677, Taiwan
[3] Natl Taiwan Normal Univ, Undergrad Program Electroopt Engn, Taipei 11677, Taiwan
关键词
bound states in the continuum; dielectric metasurfaces; electric quadrupole; refractive-index sensing; toroidal dipole; FANO RESONANCES; TERAHERTZ; ENHANCEMENT; RESONATORS;
D O I
10.1002/adom.202200812
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Symmetry-protected quasi-bound states in the continuum (BIC) controlled by metasurfaces with broken in-plane symmetry are widely exploited to achieve highly surface-sensitive and spectrally sharp resonances for nanophotonic biosensors. Through the engineering of silicon-based asymmetric nanobar pairs, a quasi-BIC mode is excited showing a dominant toroidal dipole (TD) and electric quadrupole (EQ) resonant feature in the near-infrared and performs ultrahigh sensitivity in the refractometric monitoring of local environment changes. Contrary to the typical electric and magnetic Mie-type resonances of dielectric resonators with the enhanced field mostly inside the resonator volume, the TD-EQ quasi-BIC mode is found to exhibit strong and tightly confined optical fields at the surface of tilted nanobar pairs, and its refractive-index (RI) sensitivity can be dramatically increased for nanopillars with larger aspect-ratio. The measured (simulated) sensitivity and figure of merit for nanobar pairs with a height of 450 nm reach 608 nm/RIU and 46 (612 nm/RIU and 85), respectively. Such ultrahigh sensitive all-dielectric platform can be fabricated through complementary metal-oxide-semiconductor compatible process and is promising for on-chip integration and sensor miniaturization to a wide range of diagnostic applications.
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页数:8
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