Rapid thermal annealing effects in CdTe (111) thin films grown on GaAs (100) substrates

被引:8
|
作者
Kim, MD
Kang, TW
Han, MS
Kim, TW
机构
[1] SAMSUNG ADV INST TECHNOL, MAT & DEVICES RES CTR, PHOTON SEMICOND LAB, SUWON 440600, SOUTH KOREA
[2] DONGGUK UNIV, DEPT PHYS, SEOUL 100715, SOUTH KOREA
[3] KWANGWOON UNIV, DEPT PHYS, SEOUL 139701, SOUTH KOREA
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 08期
关键词
rapid thermal annealing; CdTe; molecular beam epitaxy; photoluminescence; double crystal X-ray rocking curve;
D O I
10.1143/JJAP.35.4220
中图分类号
O59 [应用物理学];
学科分类号
摘要
Photoluminescence (PL) and double crystal X-ray rocking curve (DCRC) measurements have been carried out to investigate the rapid thermal annealing (RTA) effects in CdTe (111) epilayers grown on GaAs (100) by molecular beam epitaxy. The result of the X-ray diffraction showed that the orientation of the grown CdTe films was the (111) orientation. The full width at half maximum (FWHM) of the DCRC for as-grown CdTe layer was 400 arcs. When RTA was performed at 550 degrees C, the FWHM of the DCRC for the CdTe layer decreased 265 arcs. The results of the PL spectra showed that the luminescence intensity of a bound exciton (D-0, X) for the CdTe/GaAs annealed at 550 degrees C was raised by as much as about 53 times in comparison to the as-grown CdTe. The relative intensity ratio between (D-0, X) and the luminescence related to the defects for the as-grown and the annealed CdTe decreased by a factor of 7.8. These results indicate that the crystallinity of the CdTe epilayers grown on GaAs (100) is improved by RTA and that the RTA CdTe films grown on Si can be used for applications as buffer layers for the growth of HgxCd1-xTe.
引用
收藏
页码:4220 / 4224
页数:5
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