PREPARATION AND FERROELECTRIC PROPERTY OF (100)-ORIENTED Ca0.4Sr0.6Bi4Ti4O15 THIN FILM ON Pt/Ti/SiO2/Si SUBSTRATE

被引:1
作者
Fan, Suhua [1 ]
Che, Quande [1 ]
Zhang, Fengqing [1 ]
机构
[1] Shandong Jianzhu Univ, Coll Mat Sci & Technol, Jinan 250101, Peoples R China
基金
中国国家自然科学基金;
关键词
Ferroelectric thin film; Ca0.4Sr0.6Bi4Ti4O15; orientation; ELECTRICAL-PROPERTIES;
D O I
10.1142/S0218625X10014351
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The (100)-oriented Ca0.4Sr0.6Bi4Ti4O15(C0.4S0.6BTi) thin film was successfully prepared by a sol-gel method on Pt/Ti/SiO2/Si substrate. The orientation and formation of thin films under different annealing schedules were studied using XRD and SEM. XRD analysis indicated that (100)-oriented C0.4S0.6BTi thin film with degree of orientation of I-(200)/I-(119) = 1.60 was prepared by preannealing the film at 400 degrees C for 3 min followed by rapid thermal annealing at 800 degrees C for 5min. SEM analysis further indicated that the (100)-oriented C0.4S0.6BTi thin film with a thickness of about 800 nm was mainly composed of equiaxed grains. The remanent polarization and coercive field of the film were 16.1 mu C/cm(2) and 85 kV/cm, respectively.
引用
收藏
页码:445 / 449
页数:5
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