共 8 条
[2]
FATIKOW S, 1997, MICROSYSTEM TECHNOLO
[3]
Lotters JC, 1998, SENSOR ACTUAT A-PHYS, V68, P221, DOI 10.1016/S0924-4247(98)00049-1
[4]
LUCZAK S, 2004, ELEKTRONIKA, V8, P215
[6]
*MEMSIC INC, 2003, LOW G ACC NONLIN MEA
[7]
2005, TILT SENSING KIONIX
[8]
2006, SENSORS SENSORY SYST