MEMS: Micro technology, mega impact

被引：42

作者：

Nagel, DJ ^{[1
]}

Zaghloul, ME ^{[1
]}

机构：

[1] George Washington Univ, Dept Elect & Comp Engn, Washington, DC 20052 USA

来源：

IEEE CIRCUITS & DEVICES | 2001年 / 17卷 / 02期

关键词：

D O I：

10.1109/101.920875

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microelectronical systems (MEMSs) are devices with static or movable components with some dimensions on the scale of a micrometer. To date, the variety and applications of MEMS devices have increased dramatically, improving existing uses or enabling entirely new ones.

引用

页码：14 / 25

页数：12

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