Talbot-SNOM method for non-contact evaluation of high-density gratings

被引：9

作者：

Luo, HX ^{[1
]}

Zhou, CH ^{[1
]}

Zou, H ^{[1
]}

Lu, YQ ^{[1
]}

机构：

[1] Acad Sinica, Shanghai Inst Opt & Fine Mech, Lab Informat Opt, Shanghai 201800, Peoples R China

来源：

OPTICS COMMUNICATIONS | 2005年 / 248卷 / 1-3期

关键词：

nanotechnology; Talbot effect; high-density grating measurement;

D O I：

10.1016/j.optcom.2004.12.004

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A Talbot scanning near-field optical microscopy (SNOM) method for non-contact evaluating of high-density gratings was described. This method combines the Talbot self-imaging effect of the gratings and the conventional SNOM technique without damage. The significant advantages of this method are its simple structure, reliable and fast measurement for the surface quality of the tested gratings. Experimental results of three different kinds of gratings were demonstrated to indicate that this method is effective for evaluation surface quality of high-density gratings. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：97 / 103

页数：7

共 19 条

[1] NEAR-FIELD OPTICS - MICROSCOPY, SPECTROSCOPY, AND SURFACE MODIFICATION BEYOND THE DIFFRACTION LIMIT [J].

BETZIG, E ;

TRAUTMAN, JK .

SCIENCE, 1992, 257 (5067) :189-195

[2] Polarization Talbot self-imaging with computer-generated, space-variant subwavelength dielectric gratings [J].

Bomzon, Z ;

Niv, A ;

Biener, G ;

Kleiner, V ;

Hasman, E .

APPLIED OPTICS, 2002, 41 (25) :5218-5222

[3] EXTERNAL-REFLECTION NEAR-FIELD OPTICAL MICROSCOPE WITH CROSS-POLARIZED DETECTION [J].

BOZHEVOLNYI, SI ;

XIAO, M ;

KELLER, O .

APPLIED OPTICS, 1994, 33 (05) :876-880

[4] RESTORATION OF FAULTY IMAGES OF PERIODIC OBJECTS BY MEANS OF SELF-IMAGING [J].

DAMMANN, H ;

GROH, G ;

KOCK, M .

APPLIED OPTICS, 1971, 10 (06) :1454-&

[5] Talbot self-image effect in digital holography and its application to spectrometry [J].

De Nicola, S ;

Ferraro, P ;

Coppola, G ;

Finizio, A ;

Pierattini, G ;

Grilli, S .

OPTICS LETTERS, 2004, 29 (01) :104-106

[6] FRESNEL DIFFRACTION IMAGES OF PERIODIC STRUCTURES [J].

EDGAR, RF .

OPTICA ACTA, 1969, 16 (03) :281-+

[7] FRESNEL DIFFRACTION BY ONE-DIMENSIONAL PERIODIC OBJECTS, WITH APPLICATION TO STRUCTURE DETERMINATION OF PHASE OBJECTS [J].

GUIGAY, JP .

OPTICA ACTA, 1971, 18 (09) :677-&

[8] Investigation of the properties of an ion-etched plane laminar holographic grating [J].

Hunter, WR ;

Kowalski, MP ;

Rife, JC ;

Cruddace, RG .

APPLIED OPTICS, 2001, 40 (34) :6157-6165

[9] Fabrication and testing of chemically micromachined silicon echelle gratings [J].

Keller, LD ;

Jaffe, DT ;

Ershov, OA ;

Benedict, T ;

Graf, UU .

APPLIED OPTICS, 2000, 39 (07) :1094-1105

[10] MAKING AN ARRAY ILLUMINATOR BASED ON THE TALBOT EFFECT [J].

LOHMANN, AW ;

THOMAS, JA .

APPLIED OPTICS, 1990, 29 (29) :4337-4340

← 1 2 →