The operation experience and results of the stationary system of condition monitoring and automatic diagnostics COMPACS (R) of SPC "Dynamics" production is presented to prevent unexpected equipment failures and accidents in CDU-VDU. The system description in real conditions and the equipment analysis is presented. The causes of equipment failure are described in detail and recommendations for improving the technical and economic parameters of equipment operation and optimization of the repair cycle are offered. (C) 2015 Published by Elsevier Ltd.