Nanometer Resolving Coordinate Metrology Using Electrical Probing Contact Less 3D Microprobing

In mechanical engineering coordinate metrology belongs to the key elements of quality management. Its application may help to master challenges posed by geometrical testing in micro technology if practical problems of tactile micro probing can be solved. With smaller probing elements - prerequisite for probing micro features - limiting static and dynamic probing forces to a beareable level for workpiece and probing system is getting disproportionately more difficult. A non-contacting 3D micro probing system based on electrical interaction has been developed and investigated at the chair Quality Management and Manufacturing Metrology of university Erlangen-Nuremberg, which can be applied as an alternative to tactile 3D microprobes for 3D imcro coordinate measurements as well as for nanometer resolved topography measurements.