Fabricating microgrooves with varied cross-sections by electrodischarge machining

被引:42
作者
Van, Jiwang [1 ]
Kaneko, Takuya [1 ]
Uchida, Kazunori [1 ]
Yoshihara, Nobuhito [1 ]
Kuriyagawa, Tsunemoto [1 ]
机构
[1] Tohoku Univ, Sch Engn, Dept Nanomech, Aoba Ku, Sendai, Miyagi 9808579, Japan
关键词
Microgroove; Microchannel; Structured surface; Electrodischarge machining; EDM; Micromachining; Microfabrication; MICRO-EDM; MICROCHANNEL; GROOVES; GLASS; BURR;
D O I
10.1007/s00170-010-2563-0
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A two-step electrodischarge machining method was proposed for fabricating microgrooves with varied cross-sections on hard materials. Firstly, tungsten tool electrodes were shaped by wire electrodischarge grinding, and then the resulting tool electrodes were used to electrodischarge machine microgrooves on stainless steel. Preliminary experimental results showed that, in the first step, a sharp tool electrode with surface roughness of 0.3 mu mRa could be achieved, and the surface roughness of the resulting groove was 0.16 mu mRa in the second step. Voltage strongly affects the machining speed. A high voltage (>70 V) was preferable for improving the material removal rate. However, significant tool wear took place when using a high condenser capacitance at high voltages. To suppress tool wear, a high voltage and a small capacitance should be used. As test pieces, microgrooves having rectangular, triangular, circular and semi-closed cross-sections were fabricated.
引用
收藏
页码:991 / 1002
页数:12
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