Analysis of Squeeze Film Air Damping with Lattice Boltzmann Method in Transition Regime

被引：0

作者：

Zhu, Chengde ^{[1
]}

Li, Pu ^{[1
]}

Yang, Longfei ^{[1
]}

Fang, Yuming ^{[2
,3
]}

机构：

[1] Southeast Univ, Sch Mech Engn, Nanjing, Peoples R China

[2] Nanjing Univ Posts & Telecommun, Coll Elect & Opt Engn, Nanjing, Peoples R China

[3] Nanjing Univ Posts & Telecommun, Coll Microelect, Nanjing, Peoples R China

来源：

2019 IEEE 4TH INTERNATIONAL CONFERENCE ON INTEGRATED CIRCUITS AND MICROSYSTEMS (ICICM 2019) | 2019年

关键词：

squeeze film damping; Lattice Boltzmann method; rectangular cantilever; transition regime; MICRO; EQUATION; SURFACE; MODELS; FLOWS;

D O I：

10.1109/icicm48536.2019.8977194

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The study of squeeze film damping (SFD) under large Knudsen number is of great significance for the design of MEMS devices. The Reynolds equation based on the continuum hypothesis is no longer applicable due to the small size. In this paper, the Lattice Boltzmann method (LBM) is used to simulate the SFD of rectangular cantilever in transition regime. The quality factor obtained is compared with the values of Monte Carlo model, Reynolds equation model, and experiments. The results show that the LBM model has a better accuracy in the simulation of SFD in transition regime.

引用

页码：109 / 113

页数：5

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