Fabrication of Ge-rich SiGe-On-Insulator Waveguide for Optical Modulator

被引：0
|
作者：
Kim, Younghyun [1 ]
Yokoyama, Masafumi [1 ]
Taoka, Noriyuki [1 ]
Takenaka, Mitsuru [1 ]
Takagi, Shinichi [1 ]
机构：
[1] Univ Tokyo, Dept Elect Engn & Informat Syst, Bunkyo Ku, Tokyo 1130032, Japan
来源：
2011 IEEE PHOTONICS CONFERENCE (PHO) | 2011年
关键词：
SILICON; ALLOYS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：465 / 466
页数：2
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