Guided Assembly of Block Copolymers in Three-Dimensional Woodpile Scaffolds

被引:7
|
作者
Choi, Jaewon [1 ]
Koo, Sangmo [2 ,5 ]
Sakellari, Ioanna [6 ]
Kim, Hyeyoung [1 ]
Su, Zhengliang [2 ]
Carter, Kenneth R. [1 ]
Farsari, Maria [6 ]
Grigoropoulos, Costas P. [2 ]
Russell, Thomas P. [1 ,3 ,4 ]
机构
[1] Univ Massachusetts Amherst, Polymer Sci & Engn Dept, 120 Governors Dr, Amherst, MA 01003 USA
[2] Univ Calif Berkeley, Dept Mech Engn, Laser Thermal Lab, Berkeley, CA 94720 USA
[3] Lawrence Berkeley Natl Lab, Mat Sci Div, 1 Cyclotron Rd, Berkeley, CA 94720 USA
[4] Beijing Univ Chem Technol, Beijing Adv Innovat Ctr Soft Matter Sci & Engn, Haoyang Dist North Third Ring Rd 15, Beijing 100029, Peoples R China
[5] Incheon Natl Univ, Dept Mech Engn, 119 Acad Ro, Incheon 22012, South Korea
[6] Fdn Res & Technol Hellas FORTH, IESL, Nikolaou Plastira 100, Iraklion 70013, Crete, Greece
基金
美国国家科学基金会;
关键词
block copolymers; directed self-assembly; woodpile structures; laser direct writing; multiphoton polymerization; LINE PATTERNS; TOP-DOWN; RESOLUTION; ARRAYS; LITHOGRAPHY; FILMS; NANOFABRICATION; GRAPHOEPITAXY; MORPHOLOGY; POLYMERS;
D O I
10.1021/acsami.8b17172
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Three-dimensional (3D) nanofabrication using the directed self-assembly of block copolymers (BCPs) holds great promise for the nanoscale device fabrication and integration into 3D architectures over large areas with high element densities. In this work, a robust platform is developed for building 3D BCP architectures with tailored functionality using 3D micron-scale woodpile structures (WPSs), fabricated by a multiphoton polymerization technique. By completely filling the spaces of the WPSs and using the interactions of the blocks of the BCPs with the struts of the WPS, well-developed 3D nanoscopic morphologies are produced. Metal ion complexation with one block of the copolymer affords a convenient stain to highlight one of the microdomains of the copolymer for electron microscopy studies but also, with the reduction of the complexing salt to the corresponding metal, a simple strategy is shown to produce 3D constructs with nanoscopic domain resolution.
引用
收藏
页码:42933 / 42940
页数:8
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