共 50 条
Guided Assembly of Block Copolymers in Three-Dimensional Woodpile Scaffolds
被引:7
作者:
Choi, Jaewon
[1
]
Koo, Sangmo
[2
,5
]
Sakellari, Ioanna
[6
]
Kim, Hyeyoung
[1
]
Su, Zhengliang
[2
]
Carter, Kenneth R.
[1
]
Farsari, Maria
[6
]
Grigoropoulos, Costas P.
[2
]
Russell, Thomas P.
[1
,3
,4
]
机构:
[1] Univ Massachusetts Amherst, Polymer Sci & Engn Dept, 120 Governors Dr, Amherst, MA 01003 USA
[2] Univ Calif Berkeley, Dept Mech Engn, Laser Thermal Lab, Berkeley, CA 94720 USA
[3] Lawrence Berkeley Natl Lab, Mat Sci Div, 1 Cyclotron Rd, Berkeley, CA 94720 USA
[4] Beijing Univ Chem Technol, Beijing Adv Innovat Ctr Soft Matter Sci & Engn, Haoyang Dist North Third Ring Rd 15, Beijing 100029, Peoples R China
[5] Incheon Natl Univ, Dept Mech Engn, 119 Acad Ro, Incheon 22012, South Korea
[6] Fdn Res & Technol Hellas FORTH, IESL, Nikolaou Plastira 100, Iraklion 70013, Crete, Greece
基金:
美国国家科学基金会;
关键词:
block copolymers;
directed self-assembly;
woodpile structures;
laser direct writing;
multiphoton polymerization;
LINE PATTERNS;
TOP-DOWN;
RESOLUTION;
ARRAYS;
LITHOGRAPHY;
FILMS;
NANOFABRICATION;
GRAPHOEPITAXY;
MORPHOLOGY;
POLYMERS;
D O I:
10.1021/acsami.8b17172
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
Three-dimensional (3D) nanofabrication using the directed self-assembly of block copolymers (BCPs) holds great promise for the nanoscale device fabrication and integration into 3D architectures over large areas with high element densities. In this work, a robust platform is developed for building 3D BCP architectures with tailored functionality using 3D micron-scale woodpile structures (WPSs), fabricated by a multiphoton polymerization technique. By completely filling the spaces of the WPSs and using the interactions of the blocks of the BCPs with the struts of the WPS, well-developed 3D nanoscopic morphologies are produced. Metal ion complexation with one block of the copolymer affords a convenient stain to highlight one of the microdomains of the copolymer for electron microscopy studies but also, with the reduction of the complexing salt to the corresponding metal, a simple strategy is shown to produce 3D constructs with nanoscopic domain resolution.
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页码:42933 / 42940
页数:8
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