Viscosity measurements of thin polymer films from reflow of spatially modulated nanoimprinted patterns

被引:19
作者
Rognin, Etienne [1 ]
Landis, Stefan [1 ]
Davoust, Laurent [2 ]
机构
[1] CEA LETI Minatec Campus, F-38054 Grenoble 9, France
[2] Grenoble Inst Technol, SIMAP EPM, F-38400 St Martin Dheres, France
来源
PHYSICAL REVIEW E | 2011年 / 84卷 / 04期
关键词
MOLECULAR-WEIGHT; EVOLUTION; DYNAMICS; IMPRINT; SIZE; DRAG;
D O I
10.1103/PhysRevE.84.041805
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
We present a method to measure the viscosity of polymer thin films. The material is spin coated onto a silicon substrate and specially designed nanopatterns are imprinted on the film using thermal nanoimprint. A brief reflow is performed during which patterns flow under surface tension. Spectral densities of the topology before and after annealing are compared and the rheologic properties, such as viscosity, are extracted as fitting parameters of an evolution model. Contrary to previous similar approaches, emphasis was put on the spatial description rather than the temporal decay of the patterns. We used this method to measure the viscosity of polystyrene for two molecular weights at various temperatures and successfully recovered results of previous authors.
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页数:7
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