Wide range center wavelength trimming of vertically coupled microring resonator filter by direct UV irradiation to SiN ring core

被引：41

作者：

Haeiwa, H ^{[1
]}

Naganawa, T ^{[1
]}

Kokubun, Y ^{[1
]}

机构：

[1] Yokohama Natl Univ, Grad Sch Engn, Dept Elect & Comp Engn, Yokohama, Kanagawa 2408501, Japan

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2004年 / 16卷 / 01期

关键词：

add-drop filter; microring; optical waveguide; ring resonator; ultraviolet (UV) trimming; wavelength filter;

D O I：

10.1109/LPT.2003.818951

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We developed a precise and wide range ultraviolet (UV) trimming of the center wavelength of vertically coupled microring resonator, by using the direct UV irradiation to the SiN ring core. We discovered that the UV-induced refractive index change of SiN was -1.3 x 10(-2) and there was no aging of refractive index after the UV irradiation. Utilizing this phenomenon, -12.1 nm of center wavelength shift was demonstrated without the aging effect for 1200 h.

引用

页码：135 / 137

页数：3

共 4 条

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[2]

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[3]

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