共 50 条
- [1] Generation of high-density microwave plasma and its application to large-area microcrystalline silicon thin film formation Japanese Journal of Applied Physics, Part 2: Letters, 1998, 37 (9 A-B):
- [7] High-density microwave plasma for high rate deposition of microcrystalline silicon Thin Solid Films, 1 (7-11):
- [8] Characterization of microcrystalline silicon film growth on ZnO:Al using the high-density microwave plasma JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (02): : 837 - 841
- [9] Large-area high-density helicon plasma sources PLASMA SOURCES SCIENCE & TECHNOLOGY, 2010, 19 (03):