Creation and recombination of free radicals in fluorocarbon plasma polymers: An electron spin resonance study

被引：27

作者：

Haupt, Michael ^{[1
]}

Barz, Jakob ^{[1
]}

Oehr, Christian ^{[1
]}

机构：

[1] Fraunhofer Inst Interfacial Engn & Biotechnol, D-70569 Stuttgart, Germany

来源：

PLASMA PROCESSES AND POLYMERS | 2008年 / 5卷 / 01期

关键词：

arrhenius law; ESR/EPR; octafluorocyclobutane (c-C4F8); plasma polymerization; radicals;

D O I：

10.1002/ppap.200700096

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Generation and recombination processes of plasma-induced radicals in plasma polymers are investigated using ESR, which provides valuable information about radicals in thin polymer films. The polymer films are prepared by means of r.f. plasma polymerization of c-C4F8. Radical numbers and densities of fluorocarbon plasma polymer coatings of different thicknesses are measured by extrapolating mixed-order recombination processes. The kinetics of radical generation in plasma polymer films is modeled using the results of the time-dependent radical decay studies. The life times, line-broadening effects, activation energies, and the temperature behavior of the radicals are discussed.

引用

页码：33 / 43

页数：11

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