Promising ethanol detection enhancement of Cu2O thin film deposited by GLAD technique

被引：13
作者：
Ben Nacer, S. [1 ,2 ]
Jlidi, D. [1 ,2 ]
Labidi, A. [2 ,3 ]
Akkari, F. Chaffar [5 ]
Touihri, S. [4 ]
Maaref, M. [1 ]
机构：
[1] Univ Tunis, ENSIT, Tunis, Tunisia
[2] Univ Carthage, LMMA, IPEST, BP 51,La Marsa 2070, Tunis 2070, Tunisia
[3] Qassim Univ, Coll Sci & Arts Ar Rass, Dept Phys, POB 1162, Buraydah 52571, Saudi Arabia
[4] Tunis El Manar Univ, Fac Sci Tunis, Unite Phys Dispositifs Semicond, Tunis 2092, Tunisia
[5] Univ Tunis ElManar, Ecole Natl Ingenieurs Tunis, Lab Photovolta & Mat Semicond, BP37, Tunis 1002, Tunisia
来源：
MEASUREMENT | 2020年 / 151卷
关键词：
Ethanol sensor; GLAD; Cu2O; Nano-columnar; Porous; GAS-SENSING PROPERTIES; FACILE SYNTHESIS; OXIDE; NANOWIRES; NANOSTRUCTURES; NANOPARTICLES; PERFORMANCE;
D O I：
10.1016/j.measurement.2019.107208
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The purpose of this proposed work is the study of optical, morphological, structural and electrical properties of copper oxide (Cu2O) thins layers deposed by the technique of Glancing angle deposition (GLAD) for ethanol sensor application, for that the thickness variation effect of the layer on the various properties and its link with the deposition time of the layer on the glass substrate. It was found that the increases of deposition angle increase the layer sensitivity to ethanol as a result of the increases of porosity, decreases of layer thickness and increases of granular surface morphology. (C) 2019 Elsevier Ltd. All rights reserved.
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页数：8
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