Ge doped GaN and Al0.5Ga0.5N-based tunnel junctions on top of visible and UV light emitting diodes

被引:26
作者
Arcara, V. Fan [1 ,2 ]
Damilano, B. [1 ]
Feuillet, G. [2 ]
Vezian, S. [1 ]
Ayadi, K. [1 ]
Chenot, S. [1 ]
Duboz, J. -Y. [1 ]
机构
[1] Univ Cote Azur, CNRS, CRHEA, Rue Bernard Gregory, F-06560 Valbonne, France
[2] CEA, LETI, MINATEC Campus,17 Rue Martyrs, F-38054 Grenoble, France
关键词
NITRIDATION; DEFECTS; SI;
D O I
10.1063/1.5121379
中图分类号
O59 [应用物理学];
学科分类号
摘要
The use of tunnel junctions (TJs) is a potential solution in blue light-emitting diodes (LEDs) to poor p-contacts, replacing it with another n-contact. TJs are even more advantageous for UV-emitting structures, which suffer from considerably low injection efficiency in high Al concentration UV LEDs. In this article, we report our work on Ge n-doped GaN and AlGaN TJs grown on top of blue and UV LEDs, respectively, by a hybrid growth method. We have achieved state-of-the-art mobility (67 cm(2)/V s) and resistivity (1.7 x 10(-4) Omega cm) at a free electron concentration of 5.5 x 10(20) cm(-3) in Ge-doped GaN. With an emission wavelength of 436 nm, the GaN TJ slightly increased the optical power of the blue LED. The AlGaN TJs, on the other hand, improved the optical power of the UV LED (304 nm) by at least a factor of 3, suggesting the enhancement of the hole injection efficiency by the use of TJs in UV-emitting structures. Published under license by AIP Publishing.
引用
收藏
页数:7
相关论文
共 37 条
[1]   Ge doping of GaN beyond the Mott transition [J].
Ajay, A. ;
Schoermann, J. ;
Jimenez-Rodriguez, M. ;
Lim, C. B. ;
Walther, F. ;
Rohnke, M. ;
Mouton, I. ;
Amichi, L. ;
Bougerol, C. ;
Den Hertog, M. I. ;
Eickhoff, M. ;
Monroy, E. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2016, 49 (44)
[2]   Ultralow-voltage-drop GaN/InGaN/GaN tunnel junctions with 12% indium content [J].
Akyol, Fatih ;
Zhang, Yuewei ;
Krishnamoorthy, Sriram ;
Rajan, Siddharth .
APPLIED PHYSICS EXPRESS, 2017, 10 (12)
[3]   (Ga,In)N/GaN light emitting diodes with a tunnel junction and a rough n-contact layer grown by metalorganic chemical vapor deposition [J].
Arcara, V. Fan ;
Damilano, B. ;
Feuillet, G. ;
Courville, A. ;
Chenot, S. ;
Duboz, J. -Y. .
AIP ADVANCES, 2019, 9 (05)
[4]   STRICT THERMAL NITRIDATION SELECTIVITY BETWEEN SI AND GE USED AS A CHEMICAL PROBE OF THE OUTERMOST LAYER OF SI1-XGEX ALLOYS AND GE/SI(001) OR SI/GE(001) HETEROSTRUCTURES [J].
AUBEL, D ;
DIANI, M ;
BISCHOFF, JL ;
BOLMONT, D ;
KUBLER, L .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (04) :2699-2704
[5]   Electrical and optical properties of heavily Ge-doped AlGaN [J].
Blasco, R. ;
Ajay, A. ;
Robin, E. ;
Bougerol, C. ;
Lorentz, K. ;
Alves, L. C. ;
Mouton, I ;
Amichi, L. ;
Grenier, A. ;
Monroy, E. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2019, 52 (12)
[6]  
Carlson O.N., 1990, B ALLOY PHASE DIAGRA, V11, P567
[7]   Structural and optical properties of Si-doped GaN [J].
Cremades, A ;
Görgens, L ;
Ambacher, O ;
Stutzmann, M ;
Scholz, F .
PHYSICAL REVIEW B, 2000, 61 (04) :2812-2818
[8]   Recombination mechanisms and thermal droop in AlGaN-based UV-B LEDs [J].
De Santi, Carlo ;
Meneghini, Matteo ;
Monti, Desiree ;
Glaab, Johannes ;
Guttmann, Martin ;
Rass, Jens ;
Einfeldt, Sven ;
Mehnke, Frank ;
Enslin, Johannes ;
Wernicke, Tim ;
Kneissl, Michael ;
Meneghesso, Gaudenzio ;
Zanoni, Enrico .
PHOTONICS RESEARCH, 2017, 5 (02) :A44-A51
[9]   Theoretical estimation of tunnel currents in hetero-junctions: The special case of nitride tunnel junctions [J].
Duboz, Jean-Yves ;
Vinter, Borge .
JOURNAL OF APPLIED PHYSICS, 2019, 126 (17)
[10]   High germanium doping of GaN films by ammonia molecular beam epitaxy [J].
Fireman, Micha N. ;
L'Heureux, Guillaume ;
Wu, Feng ;
Mates, Tom ;
Young, Erin C. ;
Speck, James S. .
JOURNAL OF CRYSTAL GROWTH, 2019, 508 :19-23