Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications

Two monolithically integrated frequency tuners have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The frequency tuners use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and anti-reflection coated optical fibers. The difference between the two frequency tuners is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.